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QUANTUS LP100 GAS ANALYZER
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Real-time Endpoint and Contamination Detection from 10 mTorr to 1 Torr
The INFICON Quantus LP100 Gas Analyzer provides real-time contamination and endpoint detection for your critical process environments. Many processes are sensitive to trace amounts of contamination and as technological advances push processes to their limits, controlling contamination has become even more critical. The Quantus LP100 is a gas analyzer that is designed to instantly react to small changes in sensitive process environments so that scrap is minimized and yields are improved.
Features at a Glance
- Convenient field-replaceable plasma cell
- Easy installation using a standard KF25 connection
- Low maintenance
- Excellent detection limits down to low PPM levels
- Wide operating range of 10 mTorr to 1 Torr
- Long-term reliability: no pumps required
- Low Cost of Ownership
- Fast 10ms integration time
- Small footprint: 3.4" H x 5.9" W x 9.2" L (87mm x 151mm x 235mm)
- Support by experienced field-trained INFICON Engineers
相关技术资料
产品样本和数据表:
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Brochure - Quantus LP100 Gas Analyzer
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