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Electron Beam Gun Crucible Indexer |
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RF Sensing Technology |
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Research Quartz Crystal Microbalance (RQCM) |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Components |
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Vacuum Valves and Gas Dosing Systems |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Valves |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Valves and Fittings |
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Venting Valves |
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Venting Valves |
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Angle and Inline Valves, DN16 - 250
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Angle and Inline Valves (VAH, VIH, VAP, VIP) DN16, DN25, DN40
Manually Actuated
- Bellows feedthrough
- Quick opening with 130 o turn
- Soft start in four steps
Pneumatically Actuated
- Bellows feedthrough
- Visual indication of the open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers- without pilot valve, without position indicator
- Extremely long service life
Solenoid Actuated Angle Valves with ISO-KF Flanges (VAM) DN16-40
- Bellows feedthrough
- High conductance
- Compact design
- Electrical and visual (LED)position indication
- Selectable operating mode: Remote control via PLC or PC, Local operation
- Wide voltage range
Angle Valves (VAH, VAP) DN63
Manually Actuated
- Spindle drive with hand wheel
- Smooth opening
- Visual position indication
Pneumatically Actuated
- Visual indication for open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers without pilot valve
Manually Actuated Angle Valves with CF-Flanges (VAH) DN16-63
Standard
- For UHV and HV applications
- Bakeable at up to 180 o C in open and closed position
- FPM sealed
- Maintenance-free
All-metal
- For UHV applications
- Bakeable at up to 300 o C in open and closed position
- Copper sealed
- Maintenance-free
Angle Valves (VAH, VAP) DN100
Manually Actuated
- Bellows feedthrough
- Spindle drive with hand wheel
- Smooth opening
- Visual position indication
Pneumatically Actuated
- Bellows feedthrough
- Visual indication of the open and closed position
- Electrical position indicator for open and closed position
- For system manufactuers without pilot valve
Angle Valves (VAP) DN160
- Visual indication for open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers without pilot valve
Pneumatically Actuated Angle Valve (VAP) DN250
- Visual indication for open and closed position
- Electrical position indicator for open and closed position
- Bellows feedthrough
- High conductance
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - VAH DN16-63 CF-R
English
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Datasheet - VAH, VIH, VAP, VIP DN16
English
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Datasheet - VAH, VIH, VAP, VIP DN25
English
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Datasheet - VAH, VIH, VAP, VIP DN40
English
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Datasheet - VAM DN16-40 ISO-KF
English
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Operating Manual/Gebrauchsanleitung - VAH016-U, VAH040-U, VAH063-U
English
| German
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Operations and Maintenance Manuals:
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Instruction Sheet/Kurzanleitung - VAH016-A/X, VAH025-A/X, VAH040-A/X
English
| German
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Instruction Sheet/Kurzanleitung - VAH016-U, VAH040-U, VAH063-U
English
| German
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Instruction Sheet/Kurzanleitung - VAH016-Z, VAH040-Z, VAH063-Z
English
| German
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Instruction Sheet/Kurzanleitung - VAH063-A/X, VAH100-A/X
English
| German
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Instruction Sheet/Kurzanleitung - VAM016-A/X, VAM025-A/X, VAM040-A/X
German
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Instruction Sheet/Kurzanleitung - VAM016-A/X, vam025-A/X
English
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Instruction Sheet/Kurzanleitung - VAP016-AZ/XZ, VAP025-AZ/XZ, VAP040-AZ/XZ
English
| German
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Instruction Sheet/Kurzanleitung - VIH016-X, VIH025-X, VIH040-X
English
| German
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Operating Manual/Gebrauchsanleitung - VAH016-Z, VAH040-Z, VAH063-Z
German
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Operating Manual/Gebrauchsanleitung - VAH016-z, VAH040-Z, VAH063-Z
English
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Operating Manual/Gebrauchsanleitung - VAH063-A/X, VAH100-A/X
English
| German
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Operating Manual/Gebrauchsanleitung - VAM016-A/X, VAM025-A/X, VAM040-A/X
German
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Operating Manual/Gebrauchsanleitung - VAM016-A/X, vam025-A/X, VAM040-A/X
English
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Operating Manual/Gebrauchsanleitung - VAP063-A/X, VAP100-A/X, VAP160-A/X
English
| German
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Operating Manual/Gebrauchsanleitung - VIH016-X, VIH025-X, VIH040-X
English
| German
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