The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with dual yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with onboard calibration data guarantees high reproducibility when exchanging sensors.
Advantages
- Extremely wide measurement range from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10 -8 ...10 -2 mbar of 5%
- Pirani interlock protects the filament from premature burnout
- Dual long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
Applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - BPG402-S, BPG402-SD, BPG402-SP
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Operations and Maintenance Manuals:
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Communication Protocol - BPG402-SD
English
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EDS for BPG402 with Float EDS
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EDS for BPG402 with Integer EDS
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Instruction Sheet - BPG402-S, BPG402-SD, BPG402-SP
English
| German
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Operating Manual - BPG402-S, BPG402-SD, BPG402-SP
English
| German
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