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RF Sensing Technology
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INFICON market leading RF Sensing Technology combines the latest technical advancements in RF sensor design with quality manufacturing procedures to create a unique range of RF products to meet today's semiconductor tool process measurement needs. From simple applications like arc detection and chamber clean endpoint control to full-frequency discriminate RF analysis for predictive modeling, INFICON offers the best product portfolio to meet your RF sensing needs.
Sion RF Detector for Endpoint Control
Sion RF Detector for Plasma Arc Detection
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FabGuard FDC Sensor Integration and Analysis System
Acquisition, Analysis, Interdiction and Reporting in One Fully Integrated System
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