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Products:
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Electron Beam Gun Crucible Indexer |
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FabGuard Software Suite |
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Leak Detectors |
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Quartz Crystal Sensors |
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Quartz Monitor Crystals |
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RF Sensing Technology |
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Research Quartz Crystal Microbalance (RQCM) |
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Residual Gas Analyzers |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Components |
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Vacuum Gauges |
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Vacuum Valves and Gas Dosing Systems |
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Select Product |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Valves |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Valves and Fittings |
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Venting Valves |
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Venting Valves |
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Vacuum Valves and Gas Dosing Systems
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蝶閥 - DN 63 至 250 ISO
真空閥和氣體計量系統
爲滿足真空應用的所有要求，INFICON 提供了一整套真空閥、配件和饋入件。我們的定制加熱閥和配件專爲半導體製造業的蝕刻排氣生産綫而設計。INFICON 氣體計量控制器通過與 INFICON 真空計的互通實現對壓力的控制。
INFICON 元件 100% 通過 1 X10-9 mbar-l-s 以下的泄漏檢測。表面加工、焊接和材料規格滿足或超出高真空要求。INFICON 閥、配件和饋入件可選擇不銹鋼或鋁質，法蘭設計符合國際標準 ISO 2861、ISO 1609 和 ISO 3669。
蝶閥 - DN 63 至 250 ISO
角閥和直通閥- DN 10 - 250
角閥和直通閥- DN 200 - 1000
角閥和直通閥- DN 5
氣體計量系統
安全閥
排氣閥
相關技術信息
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