• ファラデーカップまたはファラデーカップ/ 電子増倍菅の組み合わせによる100-、200-、 300-amu のシステム
• 向上した水素感知
• 優れた ピーク振幅とポジションの安定性
• オリジナルのTranspectorと比べるとＳＮ比が10倍改善
• 低レベル信号でより速いスキャン
• 9 decadeの電気ダイナミックレンジ
• シングルとマルチチャンバーシステムのソフトウェアオプション
• 1 X 10 ^{-4^Torrから 5 X 10 ^-15} Torrまで分圧計測

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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

Brochure - Transpector 2 Gas Analysis System English

Technical Information:

Technical Note - Benefits of RGA Degassing English

Technical Note - Calculating Partial Pressures English

Technical Note - Calculating Sensitivity for RGA Partial Pressures English

Technical Note - Choosing the Appropriate RGA English

Technical Note - Heating Jackets Can Improve RGA Performance English

Technical Note - Interpretation Guide - General RGA Spectrum English

Technical Note - New Digital Input/Output Board for Transpector Gas Analysis System Using TWare 32 English

Technical Note - Partial Pressures vs. Total Pressure for an Open Ion Source RGA English

Technical Note - Residual Gas Analyzers for Contamination Checking English

Technical Note - Residual Gas Analyzers for Leak Detection English

Technical Note - The Advantages of an RGA with Analog Outputs English

Technical Note - The Practical use of Residual Gas Analysis in a Semiconductor Thermal Processing Module English

Technical Note - Transpector 2 Improvements Lead to Better Process Monitoring English

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