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Electron Beam Gun Crucible Indexer |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Valves and Gas Dosing Systems |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle Valves |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Systems |
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Gas Dosing Valves |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Safety Valves |
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Valves and Fittings |
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Venting Valves |
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Venting Valves |
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Gas Dosing Systems
- Higher yield
- Optimized cycle time
- Excellent reproducibility
- Easy system integration
Control Valve VDM005-X
- Fast response
- Wide control range at low cost
- Withstands corrosive gases - stainless steel /FPM
- Closed automatically in case of a power failure
- Smooth electromagnetic drive
Control Valve VDE016-X
- Broad control range
- Excellent reproducibility
- Status information and commands via digital interface
- Withstands corrosive gases - stainless steel / FPM
- Combined with the VCC500-Z controller, the valve closes automatically in case of a power failure
Controller VCC500-Z
- Simple operation - user friendly LCD display and function keys
- Analog - digital inputs, outputs and interfaces
- 99 PI pre-programmed control adjustments for quick and easy operation
- Adjustable PID control algorithm
- Wide variety of pre-programmed pressure gauges
Interface Module VCA200-Z
- Easy and economical system integration
- Connects an RS232C interface to the digital interface of Control Valve VDE016-X
- Inquiry of status and valve position
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - Gas Dosing Systems
English
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Operations and Maintenance Manuals:
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Gebrauchsanleitung - Heizjacke VDE040-U, VDH040-U, (Seiten 1-2); Heating Jacket for VDE040- U, VDH040-U, Operating Manual (pages 3-4)
German
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Installation Manual - VCC500, VGC012/023/401/402/403
English
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Instructions Sheet/Kurzanleitung - VDE040-U, All-Metal Control Valve
English
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Instructions Sheet/Kurzanleitung - VDE040-U, Ganzmetall-Regelventil
English
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Instructions Sheet/Kurzanleitung - VDH040-U, All-Metal Dosing Valve
English
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Instructions Sheet/Kurzanleitung - VDH040-U, Ganzmetall-Dosierventil
English
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Operating Manual/Gebrauchsanleitung - VCE500
German
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Operating Manual/Gebrauchsanleitung - VCE500, Controller
English
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Operating Manual/Gebrauchsanleitung - VDE016-X
English
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Operating Manual/Gebrauchsanleitung - VDE040-U, All-Metal Control Valve
English
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Operating Manual/Gebrauchsanleitung - VDE040-U, Ganzmetall-Regelventil
German
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Operating Manual/Gebrauchsanleitung - VDH010-A, Coarse Dosing Valve
English
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Operating Manual/Gebrauchsanleitung - VDH010-A, Grob-Dosierventil
German
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Operating Manual/Gebrauchsanleitung - VDH016-X, Dosierventil
German
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Operating Manual/Gebrauchsanleitung - VDH016-X, Dosing Valve
English
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Operating Manual/Gebrauchsanleitung - VDH040-U, All-Metal Dosing Valve
English
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Operating Manual/Gebrauchsanleitung - VDH040-U, Ganzmetall-Dosierventil
German
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